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Essential SPC for Semiconductor Manufacturing: Real-Time Quality Control in Advanced Nodes

Mastering Statistical Process Control (SPC) is an economic imperative in modern high-volume semiconductor fabrication. Written by physicist and microelectronics quality expert David Theodore, Statistical Process Control for Semiconductor Manufacturing delivers an exhaustive, mathematically rigorous roadmap for controlling variability across sub-7nm, FinFET, and Gate-All-Around (GAA) nanosheet architectures.

Designed for process integration, yield enhancement, and equipment engineers, this comprehensive guide bridges classical statistical quality control with Industry 4.0 smart fab engineering. Readers are guided through the disaggregation of line yield, die yield, and overall fab productivity, supplemented by stochastic yield models including Poisson, Seeds/Murphy, and Stapper’s Negative Binomial formulations.

Key Features & Topics Covered:

Unit Process SPC Strategies: Mapping physical metrics to real-time control strategies for DUV/EUV photolithography, plasma etch (RIE/ICP), thin-film deposition (CVD/PVD/ALD), and CMP.

Advanced Control Charting: In-depth mathematical derivations of X-R, X-S, I-MR, EWMA, and CUSUM control schemes.

Measurement Systems Analysis: Executing ANOVA-based Gauge R&R and nested hierarchical models for non-destructive and destructive analytical metrology.

Multivariate SPC & High-Dimensional Analytics: Deep dives into Hotelling’s T2, Principal Component Analysis (PCA), Partial Least Squares (PLS), and Fault Detection and Classification (FDC) sensor trace processing.

Advanced Process Control (APC): Integrating Run-to-Run (R2R) feedback loops, Box-Cox transformations, ARIMA time-series residual charts, and dynamic State-Space Kalman filtering.

Featuring real-world cleanroom case studies, hands-on experiential learning exercises, and Python/R automation workflows, this volume is the definitive technical manual for optimizing parametric yield, preventing line excursions, and driving autonomous fab operations.

Encadernação Statistical Process Control for Semiconductor Manufacturing (English Edition):Kindle
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